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VGU RESEARCH REPOSITORY


Please use this identifier to cite or link to this item: https://epub.vgu.edu.vn/handle/dlibvgu/101
Title: Wafer-scale fabrication of high-quality tunable gold nanogap arrays for surface-enhanced Raman scattering
Authors: Hai Le-The 
Jasper J. A. Lozeman 
Marta Lafuente 
Pablo Muñoz 
Johan G. Bomer 
Tong Duy Hien 
Erwin Berenschot 
Albert van den Berg 
Niels R. Tas 
Mathieu Odijk 
Jan C. T. Eijkel 
Keywords: Wafer-scale fabrication;High-quality tunable;Gold nanogap arrays;Surface-enhanced;Raman scattering
Issue Date: 2019
Publisher: Royal Society of Chemistry
Series/Report no.: Nanoscale;Vol 11(25)
Abstract: 
We report a robust and high-yield fabrication method for wafer-scale patterning of high-quality arrays of dense gold nanogaps, combining displacement Talbot lithography based shrink-etching with dry etching, wet etching, and thin film deposition techniques. By using the self-sharpening of <111>-oriented silicon crystal planes during the wet etching process, silicon structures with extremely smooth nanogaps are obtained. Subsequent conformal deposition of a silicon nitride layer and a gold layer results in dense arrays of narrow gold nanogaps. Using this method, we successfully fabricate high-quality Au nanogaps down to 10 nm over full wafer areas. Moreover, the gap spacing can be tuned by changing the thickness of deposited Au layers. Since the roughness of the template is minimized by the crystallographic etching of silicon, the roughness of the gold nanogaps depends almost exclusively on the roughness of the sputtered gold layers. Additionally, our fabricated Au nanogaps show a significant enhancement of surface-enhanced Raman scattering (SERS) signals of benzenethiol molecules chemisorbed on the structure surface, at an average enhancement factor up to 1.5 × 106.12152-12160
Index & Ranking: SCI Q1
URI(1): http://epub.vgu.edu.vn/handle/dlibvgu/101
DOI: 10.1039/c9nr02215e
Appears in Collections:ARTICLE/BOOK PUBLICATION

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