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VGU RESEARCH REPOSITORY


Please use this identifier to cite or link to this item: https://epub.vgu.edu.vn/handle/dlibvgu/897
Title: The effectiveness of using negative-stiffness in vibration isolation system
Authors: Dang An Son 
Keywords: Vibration isolation system;Negative-stiffness;Model 2D;Measurement;Natural frequency
Issue Date: 2014
Publisher: Vietnamese-German University
Abstract: 
Vibration isolation plays an important role in the operation of many advanced production and measurement systems such as semiconductor manufacturing and high precision measuring. Rapid technological developments in these fields have increased the need for higher-performance vibration isolation systems. There are two kinds of vibration that must be reduced by a vibration isolation system:
1. Vibration transmitted from the ground through the suspension (ground vibration)
2. Vibration caused by disturbances acting on an isolation table (direct disturbance)
A suspension with less stiffness is better for reducing the former because dynamic coupling between the vibration source and the isolation table is weakened; thus, zero stiffness is ideal. However, higher stiffness is better for suppressing the latter because it reduces displacement of the isolation table from its desired position; thus, infinite stiffness is ideal. In conventional passive-type vibration isolation systems, a trade-off between lower and higher stiffness is inevitable, so that performance is limited. In contrast, the active-type vibration isolation systems do not suffer from such performance limitations. However, most active vibration isolation systems use high-performance sensors, such as servo-type accelerometers, to detect the vibration of an isolation table with high sensitivity in a low-frequency domain. Since these sensors are costly, active systems are more expensive than passive systems, sometimes by a factor of ten, which represents a critical obstacle to expanding their fields of application. This project will present a novel solution to the problem of vibration isolation. It uses suspension with negative-stiffness. Infinite stiffness against direct disturbances acting on the isolation table can be achieved by combining the suspension with a normal spring. As a result, direct vibration is suppressed while system vibration transmitted from the ground is reduced significantly.
URI(1): http://epub.vgu.edu.vn/handle/dlibvgu/897
Rights: Attribution-NonCommercial 4.0 International
Appears in Collections:Mechatronics & Sensor Systems Technology (MSST)

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